On the academic side, I would personally recommend Northwestern, especially if you are into nanotechnology. They have the International Institute for Nanotechnology at Northwestern University, a world renowned nanotech institution.
From a monetary point of view, UCI might be best. A 4k savings a year is nothing to sneeze at.
I would also like to strongly encourage you to think about whether a masters degree is worth the price. I know most masters degrees are exorbitantly expensive. I know you said you have no interest in a PhD, but most PhDs are fully funded and include a stipend. This is all something to consider.